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English to Chinese translations [PRO] Tech/Engineering - IT (Information Technology) / IC lithography
English term or phrase:pattern
Recently, equipment giant ASML Holding NV shipped EUV "demo" tools to both the IMEC chip-making research consortium in Leuven, Belgium, and Albany Nanotech, the New York-based research institute. ASML is developing a more advanced "preproduction" EUV machine, which is slated to roll out in the second half of 2009. Last week, ASML claimed a breakthrough in the arena, as it used the tool to pattern 32-nm dense lines and contact holes.