English to Czech translations [PRO] Tech/Engineering - Electronics / Elect Eng | | English term or phrase: chamber cleaning | | The fourth assessment report by the Intergovernmental Panel on Climate Change identifies, for the first time, nitrogen trifluoride, a substance which is increasingly used in the electronics industry for plasma etching and chamber cleaning processes as a substitute for perfluorocarbons and sulphur hexafluoride. |
| | | Selected response from: Jakub Racek Local time: 23:45
| Grading comment Selected automatically based on peer agreement. 4 KudoZ points were awarded for this answer |
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49 mins confidence:  peer agreement (net): +2
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