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post-implantation annealing

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07:54 Apr 23, 2008
This question was closed without grading. Reason: Answer found elsewhere

English to German translations [PRO]
Tech/Engineering - Electronics / Elect Eng / Oberflächenbehandlung
English term or phrase: post-implantation annealing
Nach der "ion implantation", also der Ionenimplantation wird der Prozessschritt des *post-implantation annealing* angewendet. Wie lautet der deutsche Begriff?
MichaB
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Summary of answers provided
4Ausheilen nach der (Ionen-)Implantationsci-trans
3Nachglühen, AbschlussglühbehandlungSchtroumpf
2Aktivierung implantierter Ionen
Thomas Schnepp


Discussion entries: 4





  

Answers


16 mins   confidence: Answerer confidence 2/5Answerer confidence 2/5
Aktivierung implantierter Ionen


Explanation:
siehe Link; dort wird ein Verfahren beschrieben, das hier zutreffen könnte.


    Reference: http://www.centrotherm-ts.de/2.produktuebersicht_sic_applica...
Thomas Schnepp
Local time: 06:55
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PRO pts in category: 48
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1 hr   confidence: Answerer confidence 3/5Answerer confidence 3/5
Nachglühen, Abschlussglühbehandlung


Explanation:
Das ist zunächst mal das, was im Quelltext ausgesagt wird :-)

Schtroumpf
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5 hrs   confidence: Answerer confidence 4/5Answerer confidence 4/5
Ausheilen nach der (Ionen-)Implantation


Explanation:
Bei der Ionenimplantation entstehen Strahlenschäden im Kristallgitter des Wafers. Um diese zu beseitigen, muss der Wafer zur "Ausheilung" (annealing) über längere Zeit getempert werden.

Quellen

Ausheilen (Annealing)
http://www.imtek.de/anwendungen/content/upload/vorlesung/200...

http://de.wikipedia.org/wiki/Ionenimplanter


sci-trans
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Changes made by editors
Apr 23, 2008 - Changes made by Steffen Walter:
Field (specific)Mechanics / Mech Engineering » Electronics / Elect Eng


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