Login or register (free and only takes a few minutes) to participate in this question.
You will also have access to many other tools and opportunities designed for those who have language-related jobs (or are passionate about them). Participation is free and the site has a strict confidentiality policy.
English to Japanese translations [PRO] Tech/Engineering - Chemistry; Chem Sci/Eng / Thermal oxidation
English term or phrase:cold combustion
In the H2O2 combustion, pure hydrogen is added to oxygen. The gases are led into the quartz tube and burned in a ***cold combustion*** at above 500 °C to avoid Knallgas reaction. This process allows the fabrication of fast growing and only low impurified films, so that thick oxide layers as well as thin films at moderate temperatures (900 °C) can be procuded. The low temperature also allows fabrication of wafers which were alread doped.