Polish translation: system spopielania w tlenie/plazmie tlenowej
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21:04 Aug 29, 2008
English to Polish translations [PRO] Science - Other / nanotechnology
English term or phrase:oxygen ashing system
...the project team at Mikroelektronik Centret in Denmark worked on a new protocol to produce suspended nanostructures. The process involved a dry release method. This utilised a layer of light-sensitive material, photoresist, which was then removed through an oxygen ashing system using a plasma source. A fluorocarbon film, which acted as an anti-stiction coating, was deposited in a single reactive ion etching sequence.