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Tech/Engineering - Physics / micromachined field-emitter triodes | | English term or phrase: geometry-dependent β factors | | In order to scale this device concept to micromachined dimensions, a two-step photolithographical process has been utilized and devices with varying gate diameters and gate-to-tip recesses have been fabricated in monocrystalline silicon. The fabrication process has been described in [2] and in [4]; emission characteristics in terms of geometry-dependent β factors, scaling of emissions currents with array size, temperature dependency, pressure dependency, current fluctuations, and image formation have been presented for gate-induced operation. |
| Roman BouchevKudoZ activityQuestions: 1039 ( 1 open) ( 1 without valid answers) ( 2 closed without grading) Answers: 20
Russian Federation
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 Victor Sidelnikov
Russian Federation
Local time: 02:54
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The translation workplace 
peer agreement (net): +6