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isotropically etched

Russian translation: кремний подвергается изотропному травлению в плазменной установке травления c CF4/O2

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English term or phrase:	isotropically etched
Russian translation:	кремний подвергается изотропному травлению в плазменной установке травления c CF4/O2

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13:48 May 23, 2011

The asker opted for community grading. The question was closed on 2011-05-27 05:54:20 based on peer agreement (or, if there were too few peer comments, asker preference.)

English to Russian translations [PRO]
Tech/Engineering - Physics / micromachined field-emitter triodes

English term or phrase: isotropically etched

The devices are fabricated on (100), phosphorous-doped, 3-in silicon wafers with a resistivity of 0.005-0.025 Ω cm. Shippley 1470 photoresist is spun on and 9-µm diameter islands are defined. After resist development, the silicon is isotropically etched in a plasma etcher with CF4/O2. Etching is terminated when the island under the photoresist reaches approximately 0.5 µm.

Roman Bouchev KudoZ activity Questions: 1039 (1 open) (1 without valid answers) (2 closed without grading) Answers: 20 Russian Federation
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кремний подвергается изотропному травлению в плазменной установке травления c CF4/O2

Explanation:
*

CF4/O2 plasma - кислородосодержащая плазма

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spintronic
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кремний подвергается изотропному травлению в плазменной установке травления c CF4/O2

spintronic

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кремний подвергается изотропному травлению в плазменной установке травления c CF4/O2

Explanation:
*

CF4/O2 plasma - кислородосодержащая плазма

spintronic
Local time: 00:54
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isotropically etched

Russian translation: кремний подвергается изотропному травлению в плазменной установке травления c CF4/O2

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isotropically etched

Russian translation: кремний подвергается изотропному травлению в плазменной установке травления c CF4/O2

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KudoZ™ translation helpThe KudoZ network provides a framework for translators and others to assist each other with translations or explanations of terms and short phrases.

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