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Ganzscheibenbelichtung

English translation: full wafer exposure

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GLOSSARY ENTRY (DERIVED FROM QUESTION BELOW)
German term or phrase:Ganzscheibenbelichtung
English translation:full wafer exposure
Entered by: Anja Evans
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12:36 Oct 28, 2002
German to English translations [PRO]
Tech/Engineering
German term or phrase: Ganzscheibenbelichtung
Text über Herstellung von VLSI-Bauelementen.


Da auch die besten bisher bekannten UV-Optiken eine 1-Mikrometer-Auflösung nur auf einem Belichtungsfeld von 10x10mm^2 erreichen, mußte dabei das Prinzip der Ganzscheibenbelichtung verlassen werden. Stattdessen wird die SI-Scheibe in Teilfeldern schrittweise belichtet.
Anja Evans
Germany
Local time: 00:30
full wafer exposure
Explanation:
Sounds like this is what you're looking for. On the other hand, the full is somewhat redundant because that's the standard process, FAIK.
Selected response from:

Klaus Herrmann
Germany
Local time: 00:30
Grading comment
Vielen Dank für die Hilfe.
4 KudoZ points were awarded for this answer

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Summary of answers provided
3 +1full wafer exposure
Klaus Herrmann


  

Answers


39 mins   confidence: Answerer confidence 3/5Answerer confidence 3/5 peer agreement (net): +1
full wafer exposure


Explanation:
Sounds like this is what you're looking for. On the other hand, the full is somewhat redundant because that's the standard process, FAIK.


    Reference: http://www.micromagazine.com/archive/02/07/cassady.html
Klaus Herrmann
Germany
Local time: 00:30
Native speaker of: Native in GermanGerman
PRO pts in pair: 3373
Grading comment
Vielen Dank für die Hilfe.

Peer comments on this answer (and responses from the answerer)
agree  Ken Cox
10 hrs
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