eS31: A SINGLE E-BEAM INSPECTION PLATFORM FROM DEVELOPMENT THROUGH PRODUCTION AT 65 nm AND BELOW.

At 65-nm and below design rules, semiconductor manufacturers face unique defectivity challenges. Small, physical killer defects on front-end-of-line (FEOL) layers require highly sensitive inspection capabilities. Buried electrical defects at the back-end-of-line (BEOL) cannot be detected through conventional optical techniques, and instead require voltage contrast capabilities.

True electrical line monitoring: E-beam inspection (EBI) has long been used to capture yield-relevant electrical defects in IC development. The technology has also proven highly effective in finding excursions in volume production, making EBI a true electrical line monitoring solution. In fact, the need for production monitoring has never been more pressing. Recent industry trends show increased utilization of EBI to monitor buried electrical defects and high aspect ratio structures at each progressive design rule node.

Industry-leading capabilities: KLA-Tencor¡¯s industry-leading eS31 features superior physical defect sensitivity at 2x better throughput than previous generation tools. To augment FEOL and BEOL design and integration development, KLA-Tencor introduced µLoop, a revolutionary methodology for rapid, preferential identification of yield-limiting defects. Now onboard the eS31 platform, µLoop methodology enables leading-edge fabs to accelerate failure analysis of key process integration issues by 50 percent.

eS31: 一个从研发到制程都能够支持65纳米以下量产环境的单一电子束检测平台。

在65纳米及以下的设计规则中，半导体制造商们在控制缺陷率方面遇到了独特的挑战。检测制程前端工艺层上有致命影响的微小物理缺陷需要高度灵敏的检测能力。传统的光学技术已经无法检测到深藏在后端线的电瑕疵，不仅如此，还需要具备处理电压差异的能力。

真正意义的电子线性监控: 电子束监测系统 (EBI) 长久以来一直用于捕捉集成电路制程中与良率相关的电瑕疵。这项技术还非常有效地用来查找量产中的偏移缺陷，使电子束监测系统成为一个真正的电子线性监控解决方案。事实上，对制程监控的需要从未有过如此紧迫。当前的行业趋势显示，在每个先进设计规则的节点上，在监控深藏的电瑕疵和高宽比结构方面，都增加了对电子束监测系统的使用。

雄踞本行业领先地位: KLA-Tencor 公司引领行业的eS31，具有优异的高敏物理缺陷检测功能，比前一代检测工具的检测速度提升了两倍。为了增强前端线和后端线的设计与整合，KLA-Tencor公司研发了µLoop技术 — 一项对影响良率的缺陷进行快速优先识别的革命性技术。现在µLoop技术搭载于eS31平台，使科技领先的芯片制造厂对重点工序整合问题的故障分析速度加快50%。