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metal plug (W) polish

18:54 Jan 2, 2012
This question was closed without grading. Reason: Errant question

English to Russian translations [PRO]
Tech/Engineering - Manufacturing / Изготовление п/п пластин
English term or phrase: metal plug (W) polish
Many different types of wafers can potentially be run through
the same tool for different deposition layers. Each of these
will have different up-stream processing characteristics based
on the underlying layers, such as: photoresist ash and strip,
oxide or low-K etch, dielectric or low-K deposition, oxide and
metal plug (W) polish, wet clean, DI water rinse and dry.
Helg
Russian Federation
Local time: 23:33


Summary of answers provided
4полировка металлического (вольфрамового) покрытия
mk_lab


Discussion entries: 1





  

Answers


2 mins   confidence: Answerer confidence 4/5Answerer confidence 4/5
metal plug (w) polish
полировка металлического (вольфрамового) покрытия


Explanation:
полировка слоя оксида (кремния) и металлического (вольфрамового) покрытия

mk_lab
Ukraine
Local time: 23:33
Works in field
Native speaker of: Native in RussianRussian, Native in UkrainianUkrainian
PRO pts in category: 142
Notes to answerer
Asker: здравствуйте, тут модератор начал править (удалять и вновь выставлять) мои вопросы, получилось два одинаковых и этот я удалил. Если нетрудно повторите ваш ответ в ранее заданном этом же вопросе. А ссылка есть, где metal plug (w) - металлическое (вольфрамовое) покрытие? Спасибо.

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