German translation: Surface Micromachining (SMM) / Oberflächen-Mikromechanik
Login or register (free and only takes a few minutes) to participate in this question.
You will also have access to many other tools and opportunities designed for those who have language-related jobs (or are passionate about them). Participation is free and the site has a strict confidentiality policy.
Danke Mattias, der Link war sehr hilfreich. Habe mich nach weiterer Suche für "Surface Micromachining" entschieden,da der dritte Terminus (thermal bulk...)nicht schlüssig nachzuweisen war 3 KudoZ points were awarded for this answer