bias shield

German translation: Vorspannungsschirm

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12:22 Nov 28, 2006
English to German translations [PRO]
Tech/Engineering - Law: Patents, Trademarks, Copyright / Halbleiterherstellung
English term or phrase: bias shield
Es geht um die Halbleiterherstellung, d.h. ein plasmaverarbeitendes System mit einer power source und insgesamt drei electrical components: the first one is an electrostatic chuck, the second a bias shield, the third an inductive coil; all are coupled to the same plasma region.
Leider gibt es im Text keine weitere Beschreibung dazu, und bisher konnte ich nichts entsprechendes in D finden.

Hier die dazugehörigen Patentnummern:
WO99/14855 bzw. PCT/US98/18497
KiSTranslations
United Kingdom
Local time: 21:42
German translation:Vorspannungsschirm
Explanation:
For a patent better stick as close to the original as possible. I'm assuming this basically describes a sputtering system, although perhaps somewhat more sophisticated than this ref. starts out with.
Selected response from:

Harry Borsje
Netherlands
Local time: 22:42
Grading comment
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1 KudoZ points were awarded for this answer



Summary of answers provided
3Vorspannungsschirm
Harry Borsje


  

Answers


2 hrs   confidence: Answerer confidence 3/5Answerer confidence 3/5
Vorspannungsschirm


Explanation:
For a patent better stick as close to the original as possible. I'm assuming this basically describes a sputtering system, although perhaps somewhat more sophisticated than this ref. starts out with.



    Reference: http://deposit.ddb.de/cgi-bin/dokserv?idn=972852344&dok_var=...
Harry Borsje
Netherlands
Local time: 22:42
Native speaker of: Native in DutchDutch
PRO pts in category: 18
Grading comment
thanks
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