English translation: photo-etch-resist undercutting, undercutting
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German to English translations [PRO] Tech/Engineering - Electronics / Elect Eng / microelectronics
German term or phrase:Unterätzung
The original reads "Die Unterätzung von Strukturen erweist scih nicht nur als dickenabhängig..." and is in connection with photolithographic patterning. I believe they are referring to the phenomenon in which the dry or wet etch process undercuts the etch mask and eats away at the film underneath the protective mask, but don't know a nice concise English term for this.
from looking around the literature, this seems to be the preferred term in English, though possibly because underetching could be confused with not etching enough -- as it also can in German! 4 KudoZ points were awarded for this answer