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English translation: sputtering


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18:01 Jul 26, 2005
Japanese to English translations [PRO]
Science - Engineering: Industrial / electronics/ chemistry
Japanese term or phrase: スバッタ法
Alisa Schwell
United States
Local time: 15:54
English translation:sputtering
Looks like a typo for スパッタ
Selected response from:

Brian Leather
Local time: 20:54
Grading comment
3 KudoZ points were awarded for this answer


Summary of answers provided
4sputteringBrian Leather
2sputter deposition



1 hr   confidence: Answerer confidence 4/5Answerer confidence 4/5

Looks like a typo for スパッタ

Brian Leather
Local time: 20:54
Specializes in field
Native speaker of: Native in EnglishEnglish
PRO pts in category: 6
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3 hrs   confidence: Answerer confidence 2/5Answerer confidence 2/5
sputter deposition

sputteringでも良いと思いますが「法」が付いているのでsputter depositionとしました。

Note added at 3 hrs 5 mins (2005-07-26 21:07:19 GMT)

Sputter deposition, also known as physical vapor deposition, or PVD, is a widely used technique for depositing thin metal layers on semiconductor wafers. These layers are used as diffusion barriers, adhesion or seed layers, primary conductors, antireflection coatings, and etch stops. With the progression toward finer topographical dimensions on wafers and increasing aspect ratios, the broad angular distribution of depositing, sputtered atoms leads to poor or nonexistent coverage in deep features. This has been partially addressed using directional sputtering techniques such as collimated sputtering or long-throw sputtering. More recently, work originating in IBM has moved toward the deposition of films from metal-rich plasmas fed by sputtering, a technique known as I-PVD (for ionized PVD). This technique, based on fairly minor modifications of existing PVD systems, solves many of the intrinsic problems of PVD and appears headed for widespread manufacturing applications.

    Reference: http://www.mrs-j.org/Whatsnew/sessionI.htm
    Reference: http://www.seit.t-kougei.ac.jp/ThinFILMLab/menu/resear/resea...
Local time: 05:54
Native speaker of: Native in JapaneseJapanese
PRO pts in category: 126
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