Glossary entry

German term or phrase:

Unterätzung

English translation:

photo-etch-resist undercutting, undercutting

Added to glossary by Ohkami
Apr 1, 2005 14:50
19 yrs ago
German term

Unterätzung

German to English Tech/Engineering Electronics / Elect Eng microelectronics
The original reads "Die Unterätzung von Strukturen erweist scih nicht nur als dickenabhängig..." and is in connection with photolithographic patterning. I believe they are referring to the phenomenon in which the dry or wet etch process undercuts the etch mask and eats away at the film underneath the protective mask, but don't know a nice concise English term for this.
Proposed translations (English)
4 +2 photo-etch-resist undercutting, undercutting
3 underetching

Proposed translations

+2
8 mins
German term (edited): Unter�tzung
Selected

photo-etch-resist undercutting, undercutting

according to leo
Peer comment(s):

agree mustafaer : -
25 mins
agree Sabine Griebler
30 mins
Something went wrong...
4 KudoZ points awarded for this answer. Comment: "from looking around the literature, this seems to be the preferred term in English, though possibly because underetching could be confused with not etching enough -- as it also can in German!"
4 mins
German term (edited): Unter�tzung

underetching

not my field but seems to be the term

model x axis was superposed with the top of the underetching layer (Fig. ...
the etching process, the geometry of the underetching layer is changing. ...


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Note added at 4 mins (2005-04-01 14:55:46 GMT)
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http://www.ttp.net/3-908450-85-3/235.htm

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Note added at 6 mins (2005-04-01 14:57:38 GMT)
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http://64.233.179.104/search?q=cache:NIVOO4lJk3AJ:www.agfa.c...
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